Silicon - metal hybridization
The project consists in taking advantage of existing resources in Franche-Comté and federating
them around a new « sub-micromechanical » sector at an industrial level.
All ingredients already exist locally, in particular superior microtechnical know-how and
MEMS expertise. MEMS/Metal hybridization brings improved accuracy
by a factor of 10 to 100 compared to existing micromechanics. It will be necessary to
bring out this hybridization know-how to address a wide range of areas (medical, space sector, transport, energy…)
with « made in Franche-Comté » products.
The strategic objective is to master a product, from its design to its distribution and thus to go beyond the strict framework of components suppliers.
Integrated micro load cell
by hybrid technology
This project consists in the development of a hybrid technology for the manufacturing of force measurement cells based on miniature piezoresistive strain gauges. These gauges are arranged on a support structure whose size may vary from centimeter scale to micrometer scale.
The force will be measured at the newton scale with a resolution reaching micronewton or tenth of a micronewton. The sensor will be able to measure the force either in one or in three orthogonal directions.
These loads cells will then be integrated into two devices which are dedicated to the mechanical characterization of surfaces at the micrometric scale: a nano-indenter and a nanotribometer. These characterization devices must be able to operate as well in air or gaseous environment as in the vacuum of Scanning Electron Microscopy (SEM) chamber.
Collaborative agile miniaturized
robotics for ultra-precise assembly
Percipio Robotics is actively involved in the development of cobotic solutions, which allow the operator to have easy and reliable access to micro-manipulation and assisted micro-manipulation through the use of suited interfaces: vision, simple controls, addition of haptics interfaces.
The ambition of this project is to design new cobotic systems dedicated to micro-manipulation and micro-assembly, by adding the sense of touch to visual feedback, and by improving the man-machine interface intuitiveness and ergonomics. Then it will be validated on several concrete industrial application cases.